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July 8-November 29
在審查是否符合本基準時，應以本基準所提的所有要素作為判定依據。
This Specification defines the concepts and behaviors for the information management of substrates
The semiconductor industry provides critical enabling technology for many products and fields and has been in periods of rapid growth
· オプションA: 能動搬送（能動OHSなど）で内部ストッカーのロードポートに水平にFOUPを移載する。図1にオプションAを示す。
E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) StdTpc-Gas Particle Specifications July 8-November 29NOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1, 10. 4. 1, 10. 4. 1. 2, 10. 4. 1. 3, and Table 2. 1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the film frame front opening unified pod (FOUP) which is intended to be used to transport and store 300 mm film frames, as specified by SEMI G74 and within integrated circuit manufacturing
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